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M.Sc. Mikrosystemtechnik (de) (Master of Science)

Interdisciplinary work and research

Microsystems engineering is the engineering discipline with the broadest focus: elements from mathematics, physics, chemistry, electrical engineering and materials science form the cornerstones of exciting innovations.

Microsystems engineering - a versatile technology that industries can no longer do without

The products we deal with on a daily basis are becoming ever smaller, more powerful, smarter, more connected and more independent. Often, however, the sensors and systems that are in these everyday objects are so miniaturized that they are nearly invisible. That is precisely the reason they have taken a foothold in most industries.

A lot of the products and systems within such sectors as the automobile industry, medical services, communications and energy are unimaginable today without microsystems engineering, making your career as a microsystems engineer a versatile and exciting choice!

Your benefits as a Microsystems Engineering student:

  • Study at one of the world’s largest and leading academic research centers in the field of microsystems engineering
  • With around 440 students and 22 professors, we offer an excellent student-teacher ratio for optimal supervisory support.
  • State-of-the-art equipment with a designated clean room: Here you will become familiar with working in this special laboratory environment.

The German taught Master of Science Mikrosystemtechnik program has been designed for students with a bachelor's degree in microsystems engineering or a closely related discipline. (Students having a bachelor's in Electronics, Mechatronics, Communication and Electronics, Instrumentation, Electrical, Mechanical Engineering, are kindly asked to apply for the English taught program MSc. Microsystems Engineering.) 


  • Bachelor's degree in microsystems engineering, or in a closely related study field, previous knowledge in microsystems, mathematics, chemistry, physics, electronics, electrical and mechanical engineering and materials
  • B2 English language proficiency (IELTS 6.0 or TOEFL 87) AND
  • C1 German language proficiency

Facts and Figures

Scope: 120 ECTS credit points
Standard program duration:  4 semesters = 2 years
Language of instruction: German and English (50/50%)


winter semester
(October) or summer semester (April)


Please note: Lecture starts at the TF in WS 2020/21 on November 2nd

Fees and cost

German and EU nationals
  • 78 € to support the services offered by Studierendenwerk (SWFR)
  • 70 € administrative fee
  •   7 € to support the student council

Altogether 155 € per semester to be paid to the university.

Non-EU nationals
  • 1500 € tuition fees
  •     78 € to support the services offered by Studierendenwerk (SWFR)
  •     70 € administrative fee
  •       7 € to support the student council

Altogether 1655 € per semester to be paid to the university.

The living cost in Freiburg amounts to approximately 700 - 800 € per month.



The application period for the winter semester 2020/21 will start on April 1st.

Please register in our online application portal, enter your data and upload the following documents:

  • a certified copy of your undergraduate diploma (bachelors or equivalent) or the original document,
  • a certified copy of your undergraduate transcript of records or the original document, showing all courses and credits taken and all grades/marks obtained as well as the final/current overall average grade,
  • a certified copy of your English proficiency test result or the original document (see below),
  • a certified copy of your German proficiency test result or the original document,
  • a statement of purpose in German,
  • your Curriculum Vitae or résumé,
  • APS certificate (only for applicants who have studied in China, Mongolia or Vietnam).

Undergraduate diploma and transcript of records: If you have completed your studies, but not yet received the bachelors diploma, the transcript of records has to show the total number of credit points, final grade and the remark "degree conferred" or "degree awarded". If not, please submit an additional confirmation letter from the university stating the total number of credit points, the final grade and that the degree has been conferred.
If you have not yet completed your undergraduate studies, please submit a letter from the university confirming the expected date of completion. 

Please note: Incomplete applications will not be considered. Certificates issued in a language other than German or English must be accompanied with a translation by an authorized translator. Application documents will not be returned to you (regardless of whether you are admitted or not).



The admissions committee will verify whether you fulfill the special prerequisites specified in the admissions regulations. For further information please contact the program coordinator (see contact persons).

Please note: University admission requirements may be subject to change prior to the start of the application period.

Application deadlines:

May 31 (non-EU nationals), July 15 (EU nationals) for the winter semester
December 15 (non-EU nationals), January 15 (EU nationals) for the summer semester


FAQs pertaining to the application and admission procedure

Faculty affiliation: Faculty of Engineering




In the first semester (winter semester) students will complete six mandatory courses to complete the foundations studied in the undergraduate program. These courses are:

First semester
  • Assembly and Packaging Technology
  • Microelectronics
  • Micromechanics
  • Micro-optics
  • Sensors and Actuators
  • Microfluidics

In the second, third and fourth semester, MST students can focus in three of the following eight concentration areas (elective courses), thus allowing each student to realize his/her individual interests and obtain an in-depth look at three sub-disciplines of this very broad, interdisciplinary field:

  • Circuits and Systems
  • Design and Simulation
  • Life Sciences: Biomedical Engineering
  • Life Sciences: Lab-on-a-chip
  • Materials
  • Photonics
  • MEMS Processing
  • Sensors and Actuators

Essential for the successful completion of the Master’s degree is the submission of a Master’s thesis, which is based on a project performed during the third and fourth semesters of the program. During this time, each student works as a member of one of the 18 research groups of the department, with full access to laboratory and cleanroom infrastructure.

Possible occupational fields

Graduates of the Master's program in Mikrosystemtechnik can either apply for a PhD position or work as an engineer in a company. Potential employers are for example companies working in fields including electronics as well as mechanical, automotive, or biomedical engineering.

Syllabus and Examination Regulations

Please note: Only the latest version is listed here. Older versions can be found in Module Handbooks and Exam Regulations under Studies and Teaching.


Check out our dates and deadlines for course registration or exam registration.

Contact Persons

Do you have any questions concerning the application and admission procedure? Please contact the program coordinator:


Georges-Köhler-Allee 101
Room 101 02 013a
Phone: +49 761 203 8340

Ms. Svenja Andresen

For questions pertaining to the curriculum, please contact the academic advisors:


Georges-Köhler-Allee 103
Phone: +49 761 203 97947 or
            +49 761 203-7164

Dr. Andreas Greiner
Dr. Oswald Prucker

Particularities about this study program

Practical Cleanroom Experience

Cleanrooms are crucial for the design and production of microsystems, since the presence of even one tiny dust particle can destroy such a system. Cleanrooms are expensive to maintain and working in such a lab requires special skills. All of our Master students will participate in a cleanroom lab and may use the cleanroom during their Master thesis project (if necessary), thereby also acquiring important skills needed for working in a researcher or in a company.

A Mentor for each Student

Each professor is in charge of a number of students whom s/he mentors. These mentors help you to organize your studies and are ready to answer your questions about studying abroad, finding a job, and more.

Smart, Micro, Green

Smart – stands for robots that act independently, for computers that learn to interpret images or algorithms that become faster and smarter. Simply put, smart stands for computer science.

Micro – is meant literally here. The tiniest technical systems emerge that inconspicuously take on complex tasks in everyday life, medicine and industry. Without even knowing it, you are constantly dealing with microsystems. They make our lives healthier, safer, more comfortable, more versatile and, to say the least, easier.

Green – Freiburg is known worldwide for being the Green City. Since 2015, the Faculty of Engineering has been active from an engineering perspective with its own department for sustainability research. How can renewable energy be generated, fed into the grid and stored? How do we develop materials and systems that are produced and used in an energy- and resource-efficient way and that can adapt optimally to difficult environmental conditions or disasters?

Studying engineering in Freiburg always means that you benefit from all three areas of research, no matter which area you choose. Smart, micro and green technologies are becoming more and more in demand - acquire the necessary competencies to solve the social and technical questions of the future as engineers and computer scientists!

Further Information

Website of the Department of Microsystems Engineering

Overview with some important (administrative) informations for new students